Title:
減圧乾燥装置
Document Type and Number:
Japanese Patent JP5422935
Kind Code:
B2
Inventors:
Hidetoshi Takahashi
Application Number:
JP2008194532A
Publication Date:
February 19, 2014
Filing Date:
July 29, 2008
Export Citation:
Assignee:
Toppan Printing Co., Ltd.
International Classes:
H01L21/027; F26B5/04; F26B9/06; F26B25/00; G02B5/20; B05C9/02
Domestic Patent References:
| JP2004253701A | ||||
| JP9306851A | ||||
| JP4119373U | ||||
| JP8509754A | ||||
| JP62251105A |