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Title:
磁気センサ
Document Type and Number:
Japanese Patent JP5433849
Kind Code:
B2
Abstract:

To provide a compact and thin magnetic sensor with a built-in magnetic material for magnetic amplification.

The magnetic sensor includes: an insulating film 2 having an opening at a part of an external connection terminal pad part 3, on a semiconductor substrate including a semiconductor circuit 1 and a plurality of Hall elements 4; a base current carrying layer 5 disposed on the insulating film at a part covering a magnetic sensing part of the plurality of Hall elements; a base current carrying layer 5 arranged regardless of the base current carrying layer on the external connection terminal pad part and on the insulating film at the periphery of the pad part at a position separated from the covering part; a magnetic material 6 arranged on the base current carrying layer; a rewiring current carrying layer 7 arranged on the base current carrying layer; an insulating film 8 which is arranged continuously on the insulating film exposed between the rewiring layer and the magnetic material, on the rewiring layer, and on the magnetic material and which includes an opening at the periphery part; a solder forming base layer 9 arranged on the rewiring layer so as to bury the opening; and an external connection solder part 10 arranged on the solder forming base layer.

COPYRIGHT: (C)2010,JPO&INPIT


Inventors:
Hironori Ishii
Toshiaki Fukunaka
Application Number:
JP2008271122A
Publication Date:
March 05, 2014
Filing Date:
October 21, 2008
Export Citation:
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Assignee:
Asahi Kasei Electronics Co., Ltd.
International Classes:
G01R33/07; H01L43/04
Domestic Patent References:
JP2005277034A
JP2007263721A
JP11233849A
JP2007005339A
Attorney, Agent or Firm:
Yoshikazu Tani



 
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