Title:
トリクロロシラン製造装置
Document Type and Number:
Japanese Patent JP5444745
Kind Code:
B2
Inventors:
Power of Inaba
Takeguchi Masakatsu
Takeguchi Masakatsu
Application Number:
JP2009031310A
Publication Date:
March 19, 2014
Filing Date:
February 13, 2009
Export Citation:
Assignee:
Mitsubishi Materials Corporation
International Classes:
C01B33/107
Domestic Patent References:
| JP2145413A |
Attorney, Agent or Firm:
Masakazu Aoyama
Previous Patent: LONG STRAND WIRE MULTIPLE PROJECTION NEEDLE ELECTRODE FOR DISCHARGING AND COLLECTING CURRENT
Next Patent: MULTILAYER CONTACT STRUCTURE
Next Patent: MULTILAYER CONTACT STRUCTURE