Title:
感光性樹脂組成物、該樹脂組成物を用いたパターン硬化膜の製造方法及び電子部品
Document Type and Number:
Japanese Patent JP5446203
Kind Code:
B2
Inventors:
Kenichi Iwashita
Minegishi Tomonori
Nokita Rika
Minegishi Tomonori
Nokita Rika
Application Number:
JP2008266824A
Publication Date:
March 19, 2014
Filing Date:
October 15, 2008
Export Citation:
Assignee:
Hitachi Chemical DuPont Micro Systems Co., Ltd.
International Classes:
G03F7/023; G03F7/004; G03F7/40; H01L21/027
Domestic Patent References:
| JP2007017959A | ||||
| JP2008046258A |
Foreign References:
| WO2005069075A1 | ||||
| WO2008111470A1 |
Attorney, Agent or Firm:
Hiroaki Sakai