Title:
照明光学系、露光装置及び投射装置
Document Type and Number:
Japanese Patent JP5447445
Kind Code:
B2
Inventors:
Kazuya Miyagaki
Kenji Kameyama
Takanobu Osaka
Ikuo Kato
Yasuyuki Takiguchi
Kenji Kameyama
Takanobu Osaka
Ikuo Kato
Yasuyuki Takiguchi
Application Number:
JP2011153124A
Publication Date:
March 19, 2014
Filing Date:
July 11, 2011
Export Citation:
Assignee:
株式会社リコー
International Classes:
H01L21/027; B23K26/064; G02B5/18; G02B5/32; G02B19/00; G03B21/14
Domestic Patent References:
| JP60168133A | ||||
| JP9080311A | ||||
| JP2003022579A | ||||
| JP2003090959A | ||||
| JP4859311B2 |
Attorney, Agent or Firm:
Takao Maruyama