Title:
半導体製造装置のクリーニング方法及び半導体装置の製造方法
Document Type and Number:
Japanese Patent JP5449259
Kind Code:
B2
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Inventors:
Kenichiro Toraya
Takashi Nakao
History of Somune
Yoshinaga peace
Takashi Nakao
History of Somune
Yoshinaga peace
Application Number:
JP2011131278A
Publication Date:
March 19, 2014
Filing Date:
June 13, 2011
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
H01L21/205; C23C16/44; H01L21/3065
Domestic Patent References:
JP2008098431A | ||||
JP2008078457A |
Foreign References:
WO2005081302A1 |
Attorney, Agent or Firm:
Masahiko Hinataji