静電チャックおよびその製造方法

Title:

静電チャックおよびその製造方法

Document Type and Number:

Japanese Patent JP5449750

Kind Code:

B2

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Inventors:

Tetsuo Kitabayashi
Chika Saito
Hiromasa Shimoshima
Nomura Toshikatsu
Hironori Ishida

Application Number:

JP2008295267A

Publication Date:

March 19, 2014

Filing Date:

November 19, 2008

Export Citation:

Assignee:

Nippon Ceratech Co., Ltd.
Taiheiyo Cement Co., Ltd.

International Classes:

H01L21/683; H02N13/00

Domestic Patent References:

Attorney, Agent or Firm:

Takeo Fukuchi

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