Title:
露光装置、露光方法及びディスプレイの製造方法
Document Type and Number:
Japanese Patent JP5453806
Kind Code:
B2
Abstract:
An exposure apparatus of the present invention is an exposure apparatus for, while moving a first object M and a second object P along a scanning direction, performing projection exposure on the second object, which has a first projection optical system PL10 for forming an enlargement image of a portion on the first object in a first region being a partial region on the second object, and a second projection optical system PL11 for forming an enlargement image of a different portion from the portion on the first object in a second region different from the partial region on the second object, and which also has a first stage MST holding the first object and making at least one of the portion and the different portion of the first object movable along the non-scanning direction, wherein the first region and the second region are arranged at a predetermined interval along the non-scanning direction intersecting with the scanning direction.
Inventors:
Kumazawa Masato
Tatsuo Fukui
Tatsuo Fukui
Application Number:
JP2008500449A
Publication Date:
March 26, 2014
Filing Date:
February 06, 2007
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F7/20; G03F1/42; G03F1/68; H01L21/027; G03F1/00
Domestic Patent References:
| JP2005024941A | 2005-01-27 | |||
| JP2005039211A | 2005-02-10 | |||
| JP2001168003A | 2001-06-22 | |||
| JP2000331909A | 2000-11-30 | |||
| JP2004335864A | 2004-11-25 | |||
| JPH11265848A | 1999-09-28 | |||
| JP2004327660A | 2004-11-18 | |||
| JPH08250399A | 1996-09-27 |
Attorney, Agent or Firm:
Yoshihiro Fujimoto