Title:
電力用半導体装置の製造方法
Document Type and Number:
Japanese Patent JP5455463
Kind Code:
B2
Inventors:
Toshiaki Hikiji
Application Number:
JP2009149813A
Publication Date:
March 26, 2014
Filing Date:
June 24, 2009
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
H01L21/336; H01L29/739; H01L29/78
Domestic Patent References:
JP2163974A | ||||
JP2008244228A | ||||
JP2002222951A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita