Title:
オプティカルインテグレータ系、照明光学装置、露光装置、およびデバイス製造方法
Document Type and Number:
Japanese Patent JP5459571
Kind Code:
B2
Abstract:
An optical integrator system comprises a first optical integrator including a plurality of first wavefront dividing elements arranged in juxtaposition along a predetermined direction, and a second optical integrator including a plurality of second wavefront dividing elements arranged in juxtaposition along the predetermined direction, which are arranged in order from the entrance side of light. The first wavefront dividing elements are so constructed that rays obliquely incident to a center on the optical axis of an entrance surface are emitted in parallel with the optical axis. The second wavefront dividing elements are so constructed that rays obliquely incident to a center on the optical axis of an entrance surface are emitted obliquely to the optical axis.
Inventors:
Kita Naoko
Application Number:
JP2008059363A
Publication Date:
April 02, 2014
Filing Date:
March 10, 2008
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
H01L21/027; G02B3/00; G02B3/06; G02B19/00; G03F7/20
Domestic Patent References:
| JP11202129A | ||||
| JP2006222344A | ||||
| JP2005005407A | ||||
| JP2004045885A | ||||
| JP2006253529A |
Foreign References:
| WO2003096118A1 | ||||
| WO2006070580A1 | ||||
| US20040263977 | ||||
| WO2007119514A1 | ||||
| WO2007060834A1 |
Attorney, Agent or Firm:
Takao Yamaguchi