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Patent Searching and Data


Title:
電界効果トランジスタの製造方法
Document Type and Number:
Japanese Patent JP5463529
Kind Code:
B2
Inventors:
Takehiko Nomura
Niiyama Yuki
Hiroshi Kambayashi
Kiyoteru Yoshida
Cho, Tatsushin Paul
Application Number:
JP2009140583A
Publication Date:
April 09, 2014
Filing Date:
June 11, 2009
Export Citation:
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Assignee:
THE FURUKAW ELECTRIC CO.,LTD.
Rensselaer Polytechnic Institute
International Classes:
H01L29/786; H01L21/336; H01L21/338; H01L29/778; H01L29/78; H01L29/812
Domestic Patent References:
JP2006286953A
JP11501463A
JP2007189213A
JP2005159117A
Foreign References:
WO2003071607A1
Attorney, Agent or Firm:
Hiroaki Sakai
Tashiro Toshio