Title:
マイクロリソグラフィ投影露光装置における偏光分布を修正する方法及びマイクロリソグラフィ投影露光装置
Document Type and Number:
Japanese Patent JP5465247
Kind Code:
B2
Inventors:
Fiorca damian
Application Number:
JP2011519048A
Publication Date:
April 09, 2014
Filing Date:
June 17, 2009
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
H01L21/027; G02B5/30; G02B19/00; G03F7/20
Domestic Patent References:
| JP2008066565A | ||||
| JP2007180088A | ||||
| JP8313842A | ||||
| JP2006237616A |
Foreign References:
| WO2007039519A1 |
Attorney, Agent or Firm:
Koichi Tsujii
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi