Title:
表面増強赤外吸収センサーの製造方法
Document Type and Number:
Japanese Patent JP5476574
Kind Code:
B2
Abstract:
The method for producing a surface enhanced infrared absorption sensor of the invention is characterized by : adsorbing metallic nanoparticles dispersed in a solution on a surface of a substrate, or allowing the adsorbed metallic nanoparticles to be grown in a solution, thereby forming a film; applying infrared light to the substrate from the side thereof opposite to the side on which the metallic nano-thin film is disposed; detecting evanescent waves exuding from the substrate; and regulating a surface enhanced infrared adsorption activity while monitoring surface enhanced infrared adsorption signals in situ, whereby the metallic nano-thin film is grown in the form of flat and discontinuous islands. According to the method, there is provided a production technique for a surface enhanced infrared absorption (SEIRA) sensor having a higher sensitivity and more excellent in the reproducibility.
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Inventors:
Tadaaki Nagao
Dominique enders
Tomonobu Nakayama
Masakazu Aono
Dominique enders
Tomonobu Nakayama
Masakazu Aono
Application Number:
JP2012144529A
Publication Date:
April 23, 2014
Filing Date:
June 27, 2012
Export Citation:
Assignee:
National Institute for Materials Science
International Classes:
B82Y15/00; G01N21/41; B82Y40/00; C23C14/04; G01N21/35; G01N21/552; G01N21/64; G01N21/65
Domestic Patent References:
| JP2002267602A | ||||
| JP8062125A |
Attorney, Agent or Firm:
Toshio Nishizawa