Title:
MEMSデバイスの製造方法
Document Type and Number:
Japanese Patent JP5477711
Kind Code:
B2
Inventors:
Tetsuhisa Sakamoto
Masahiro Nakatani
Masahiro Nakatani
Application Number:
JP2010020657A
Publication Date:
April 23, 2014
Filing Date:
February 01, 2010
Export Citation:
Assignee:
Nippon Electronic Materials Co., Ltd.
International Classes:
C25D1/00; C25D1/20; G01R1/067; G01R1/073
Domestic Patent References:
| JP2011140101A | ||||
| JP8176757A |
Attorney, Agent or Firm:
▲吉▼川 俊雄