Title:
オゾン供給方法及びその装置
Document Type and Number:
Japanese Patent JP5481783
Kind Code:
B2
Inventors:
Yoshiki Morikawa
Application Number:
JP2007318091A
Publication Date:
April 23, 2014
Filing Date:
December 10, 2007
Export Citation:
Assignee:
KABUSHIKI KAISHA MEIDENSHA
International Classes:
C01B13/11; B01J4/00
Domestic Patent References:
JP2001304756A | ||||
JP2003020211A | ||||
JP11092113A | ||||
JP2005279641A |
Foreign References:
WO2005058753A1 |
Attorney, Agent or Firm:
Hiromichi Kobayashi
Uzawa Hidehisa
Tsuyoshi Hashimoto
Uzawa Hidehisa
Tsuyoshi Hashimoto