Title:
水酸化テトラアルキルアンモニウムの製造方法
Document Type and Number:
Japanese Patent JP5483958
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method by which tetraalkylammonium hydroxide (TAAH) can efficiently be produced even without carrying out electrodialysis or electrolysis, in particular, easy production can be performed with simple equipment using, e.g. a photoresist development waste liquid as a raw material.SOLUTION: The TAAH is produced by bringing readily available tetraalkylammonium chloride which is a stable substance, in particular, the tetraalkylammonium chloride recovered from the waste liquid containing the TAAH into contact with an anion exchange resin having a hydroxide ion as a counter ion.
Inventors:
Murata Akiko
Atsushi Iwai
Atsushi Iwai
Application Number:
JP2009197778A
Publication Date:
May 07, 2014
Filing Date:
August 28, 2009
Export Citation:
Assignee:
Tokuyama Corporation
International Classes:
C07C209/84; B01J39/04; B01J41/04; B01J49/00; C02F1/42; C07C211/63; G03F7/32
Domestic Patent References:
| JP2004315375A | ||||
| JP2003340449A | ||||
| JP2004066102A | ||||
| JP2007323095A | ||||
| JP2006154279A | ||||
| JP10099853A | ||||
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