Title:
プラズマ密度調整部材
Document Type and Number:
Japanese Patent JP5485327
Kind Code:
B2
Inventors:
Takashi Yamamoto
Yoshiyuki Nozawa
Yoshiyuki Nozawa
Application Number:
JP2012093087A
Publication Date:
May 07, 2014
Filing Date:
April 16, 2012
Export Citation:
Assignee:
spp Technologies Co., Ltd.
International Classes:
H01L21/3065; H05H1/46
Domestic Patent References:
| JP2001007083A | ||||
| JP2004241437A | ||||
| JP2010238847A | ||||
| JP2005531125A |
Attorney, Agent or Firm:
Satoshi Murakami