Title:
イオンを冷却する装置および方法
Document Type and Number:
Japanese Patent JP5495373
Kind Code:
B2
Abstract:
An apparatus for secondary ion mass spectrometry is provided having a target surface for supporting a sample on the target surface and an ion source configured to direct a beam of primary ions toward the sample to sputter secondary ions and neutral particles from the sample, A first chamber having an inlet provides gas to maintain high pressure at the sample for cooling the secondary ions and neutral particles, the high pressure being in the range of about 10−3 to about 1000 Torr. A method of secondary ion mass spectrometry is provided having a target surface for supporting a sample, directing a beam of primary ions toward the sample to sputter secondary ions and neutral particles from the sample, and providing a high pressure at the sample for cooling the secondary ions and neutral particles, the high pressure being in the range of about 10−3 to about 1000 Torr.
Inventors:
Roboda, Alexander Buoy.
Application Number:
JP2009545773A
Publication Date:
May 21, 2014
Filing Date:
January 18, 2008
Export Citation:
Assignee:
MDS INC.
Applied Biosystems (Canada) Limited
Applied Biosystems (Canada) Limited
International Classes:
H01J49/16; G01N27/62
Domestic Patent References:
| JP2001057174A | ||||
| JP2005502993A | ||||
| JP2000162164A | ||||
| JP2005044594A | ||||
| JP4065060A |
Foreign References:
| WO2006133786A1 |
Attorney, Agent or Firm:
Hidesaku Yamamoto
Takaaki Yasumura
Natsuki Morishita
Takaaki Yasumura
Natsuki Morishita