Title:
ステージ装置、露光装置及びデバイスの製造方法
Document Type and Number:
Japanese Patent JP5495948
Kind Code:
B2
Inventors:
Akihiro Takahashi
Application Number:
JP2010121147A
Publication Date:
May 21, 2014
Filing Date:
May 27, 2010
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/027; G03F7/20; H01L21/68
Domestic Patent References:
| JP2007232647A | ||||
| JP2006086442A | ||||
| JP2000164494A | ||||
| JP8166475A | ||||
| JP10125767A | ||||
| JP2006049465A | ||||
| JP2000216084A |
Attorney, Agent or Firm:
Ryoichi Takaoka
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