Title:
熱処理装置
Document Type and Number:
Japanese Patent JP5497992
Kind Code:
B2
Inventors:
Tatsufumi Kusuda
Application Number:
JP2008077132A
Publication Date:
May 21, 2014
Filing Date:
March 25, 2008
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
H01L21/26; H01L21/268
Domestic Patent References:
| JP2004515085A | ||||
| JP2005026354A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita