Title:
窒化ガリウム結晶製造装置のガリウム供給方法及び装置
Document Type and Number:
Japanese Patent JP5499888
Kind Code:
B2
Inventors:
Tomoya Muramoto
Katsuaki Matsuzawa
Katsuaki Matsuzawa
Application Number:
JP2010108210A
Publication Date:
May 21, 2014
Filing Date:
May 10, 2010
Export Citation:
Assignee:
Ihi Co., Ltd.
International Classes:
C30B29/38; C30B19/02
Domestic Patent References:
| JP2006062947A | ||||
| JP2003286099A | ||||
| JP2009114035A | ||||
| JP2002542142A | ||||
| JP59228963A | ||||
| JP2107363A | ||||
| JP2009057265A | ||||
| JP2009096701A |
Attorney, Agent or Firm:
Mitsuo Sakamoto
Hideharu Asao
Hideharu Asao