Title:
加速度センサおよびその製造方法
Document Type and Number:
Japanese Patent JP5502331
Kind Code:
B2
Abstract:
Provided is an acceleration sensor that has high detection sensitivity and that can enhance production efficiency. The acceleration sensor has: a ceramic substrate made of Al2O3; a ferroelectric layer formed in a predetermined area on the ceramic substrate by screen printing, the ferroelectric layer being made of BaTiO3; a proof mass disposed so as to face the ferroelectric layer, the proof mass being formed at a predetermined distance d from the ferroelectric layer; and a first electrode and a second electrode that are formed on that side of the proof mass which faces the ferroelectric layer, so as to be fixed thereto. The first electrode and the second electrode are each formed in the shape of comb teeth, and comb tooth portions and thereof are arranged in an alternating manner.
Inventors:
Yasuhiro Yoshikawa
Hiroyuki Tajiri
Hiroyuki Tajiri
Application Number:
JP2008558573A
Publication Date:
May 28, 2014
Filing Date:
May 16, 2008
Export Citation:
Assignee:
ROHM Co., Ltd.
International Classes:
G01P15/125; G01P15/18; H01L29/84
Domestic Patent References:
| JPH11132706A | 1999-05-21 | |||
| JPH05333056A | 1993-12-17 | |||
| JP2007333618A | 2007-12-27 | |||
| JP2006321017A | 2006-11-30 | |||
| JPH05288623A | 1993-11-02 | |||
| JP2005311156A | 2005-11-04 | |||
| JP2001217146A | 2001-08-10 | |||
| JPH11133055A | 1999-05-21 | |||
| JP2006263902A | 2006-10-05 | |||
| JPH06107483A | 1994-04-19 | |||
| JPH03180361A | 1991-08-06 | |||
| JPH11132706A | 1999-05-21 | |||
| JPH05333056A | 1993-12-17 | |||
| JP2007333618A | 2007-12-27 |
Foreign References:
| US20040239341A1 | 2004-12-02 | |||
| US20040239341A1 | 2004-12-02 |
Other References:
JPN6008028934; 青柳誠司，熊野将，吉川大一朗，磯野裕一: '強誘電体とポリマー可動体を用いたマイクロ加速度センサの開発' ２００６年度精密工学会秋季大会学術講演会講演論文集 , 20060904, ９５５-９５６, 社団法人精密工学会
Attorney, Agent or Firm:
Shizuo Sano