Title:
トンネル電流検知を使用する微小電気機械システム(MEMS)をベースにしたセンサを較正するための方法およびシステム
Document Type and Number:
Japanese Patent JP5503106
Kind Code:
B2
Abstract:
A system (90) and method for controlling a tunneling current (42) between a first element (40a) and a second element (40b) of a micro-electromechanical system (MEMS) sensor. The system includes a tunneling current excitation source (50) for providing a tunneling current between the elements and a tunneling current monitor (52) for monitoring a change in the tunneling current responsive to movement of at least one element. The system also includes a positioner (86) for positioning at least one of the elements and a controller (88) in communication with the tunneling current monitor for controlling the positioner to position at least one of the elements at a first spacing between the elements for configuring the system in a referencing mode; and to position the elements at a second spacing for configuring the system in a sensing mode, whereby the system is calibrated with respect to the referencing mode.
Inventors:
Emmad Andarawis Andarawis
Arty gururu bark can
Arty gururu bark can
Application Number:
JP2007338447A
Publication Date:
May 28, 2014
Filing Date:
December 28, 2007
Export Citation:
Assignee:
GENERAL ELECTRIC COMPANY
International Classes:
G01R15/14; G01R19/00; G01R33/02; G01R35/00
Domestic Patent References:
| JP2000338143A |
Foreign References:
| US5449909 |
Attorney, Agent or Firm:
Arakawa Satoshi
Hirokazu Ogura
Toshihisa Kurokawa
Hirokazu Ogura
Toshihisa Kurokawa