Title:
約1nmから約30nmの波長範囲の放射線を発生させる方法および機器、ならびにリソグラフィー装置
Document Type and Number:
Japanese Patent JP5503108
Kind Code:
B2
Abstract:
A method and an apparatus generate radiation in the wavelength range from about 1 nm to about 30 nm by an electrically operated discharge, which can be used in lithography or in metrology. A working gas is provided between two electrodes. Plasma is ignited in the working gas to generate radiation which is forwarded via an opening for further use. Debris particles are produced in at least one region of at least one of the electrodes. To retain the debris particles, the region is arranged with respect to the opening in such a way that movement paths of the debris particles run at least predominantly outside an area delimited by the opening.
Inventors:
Yonkers, Yerun
Faodo Lefange, Dominique Marcel
Faodo Lefange, Dominique Marcel
Application Number:
JP2007542431A
Publication Date:
May 28, 2014
Filing Date:
November 18, 2005
Export Citation:
Assignee:
KONINKLIJKE PHILIPS N.V.
International Classes:
H05G2/00; G03F7/20; G03F7/23; H01L21/027
Domestic Patent References:
| JP2004165155A | ||||
| JP2001160499A | ||||
| JP3201399A | ||||
| JP62172648A | ||||
| JP61250948A | ||||
| JP61251033A |
Foreign References:
| WO2004082340A1 |
Attorney, Agent or Firm:
Tadahiko Ito
Shinsuke Onuki
Tadashige Ito
Koichi Matsumoto
Shinsuke Onuki
Tadashige Ito
Koichi Matsumoto