Title:
ヒータユニット
Document Type and Number:
Japanese Patent JP5504102
Kind Code:
B2
Inventors:
Masafumi Yamakawa
Application Number:
JP2010189664A
Publication Date:
May 28, 2014
Filing Date:
August 26, 2010
Export Citation:
Assignee:
Bridgestone Corporation
International Classes:
C23C16/46; H01L21/205; H05B3/00
Domestic Patent References:
| JP2011081939A | ||||
| JP2005277242A | ||||
| JP2002170652A | ||||
| JP2007204827A | ||||
| JP9097765A |
Attorney, Agent or Firm:
Hidekazu Miyoshi
Iwa Saki Kokuni
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu
Iwa Saki Kokuni
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu