Title:
酸化物超電導薄膜の製造方法
Document Type and Number:
Japanese Patent JP5505867
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a manufacturing method of an oxide superconducting thin film with excellent superconducting characteristics having high Ic by sufficient growth of a c-axis oriented crystal using an FF-MOD method.SOLUTION: A manufacturing method of an oxide superconducting thin film used for manufacturing a superconducting wire rod by a coating thermal decomposition method with an atmosphere furnace using a fluorine-free metal organic compound as a raw material comprises: a coating film making step in which a coating film is made by coating on a substrate with a solution of the metal organic compound; a calcination heat treatment step in which a calcined film is made by thermal decomposition and removal of an organic constituent contained in the metal organic compound of the coating film; and a sintering heat treatment step in which the oxide superconducting thin film is made by crystallization of the calcined film. An intermediate heat treatment step in which carbonate contained in the calcined film is decomposed by heat conducted from the heated substrate is provided between the calcination heat treatment step and the sintering heat treatment step.
Inventors:
Takeshi Nakanishi
Ryuki Nagaishi
Genki Honda
Kei Hanafusa
Ryuki Nagaishi
Genki Honda
Kei Hanafusa
Application Number:
JP2010138317A
Publication Date:
May 28, 2014
Filing Date:
June 17, 2010
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
H01B13/00; C01G1/00; C01G3/00; H01B12/06
Domestic Patent References:
| JP2012003965A | ||||
| JP2010049891A | ||||
| JP5009022A | ||||
| JP5147941A | ||||
| JP2055207A | ||||
| JP2000208828A |
Foreign References:
| WO2010021159A1 |
Attorney, Agent or Firm:
Tetsuji Kamidai
Naomi Kamino
Naomi Kamino