Title:
力覚センサ用チップおよび加速度センサ用チップ
Document Type and Number:
Japanese Patent JP5507306
Kind Code:
B2
Abstract:
A force sensor chip of the present invention is for detecting an external force, and comprises a base member including an action portion where the external force is applied, a support portion that supports the action portion therearound, and a connecting portion that connects the action portion and the support portion together, a plurality of strain detecting resistive elements that are formed at respective deformation producing portions of the base member which deform when the external force is applied, and a thin-film resistor that is formed at upper layers of the strain detecting resistive elements with a resistive-element wiring and an interlayer insulation film intervening between the thin-film resistor and the strain detecting resistive elements.
Inventors:
Takeshi Osato
Application Number:
JP2010076892A
Publication Date:
May 28, 2014
Filing Date:
March 30, 2010
Export Citation:
Assignee:
Honda motor industry stock company
International Classes:
G01L5/16; G01P15/12; G01P15/18
Foreign References:
| US3662312 |
Attorney, Agent or Firm:
Isono Dozo
Etsuo Tada
Etsuo Tada