強誘電体膜、電子部品及び強誘電体膜の製造方法

Title:

強誘電体膜、電子部品及び強誘電体膜の製造方法

Document Type and Number:

Japanese Patent JP5509419

Kind Code:

B2

Abstract:

To provide a ferroelectric film for converting orientation of the ferroelectric film to be crystallized for optional control.

The ferroelectric film includes: a Pt film 4 subjected to (111) orientation formed on a substrate; and a PZT film 6 formed on the Pt film. The PZT film is orientated in one of (111)+(001), (001), (001)+(110), and (110).

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Inventors:

Ken Kijima
Yuji Honda
Haruhito Hayakawa

Application Number:

JP2009173435A

Publication Date:

June 04, 2014

Filing Date:

July 24, 2009

Export Citation:

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