Title:
フィルム基板矯正装置及びフィルム基板矯正方法
Document Type and Number:
Japanese Patent JP5526002
Kind Code:
B2
Inventors:
Shinro Murata
Takahiro Miyata
Mitsuru Yahagi
Shinsuke Iguchi
Takahiro Miyata
Mitsuru Yahagi
Shinsuke Iguchi
Application Number:
JP2010257647A
Publication Date:
June 18, 2014
Filing Date:
November 18, 2010
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
H05K3/00; H01L21/60
Domestic Patent References:
| JP61089694A | ||||
| JP2005129935A | ||||
| JP2009184361A | ||||
| JP2008135602A |
Attorney, Agent or Firm:
Shigeo Ishijima
Hideki Abe
Hideki Abe