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Patent Searching and Data


Title:
パターン形成方法及びレジスト組成物
Document Type and Number:
Japanese Patent JP5533821
Kind Code:
B2
Inventors:
畠山 潤
長谷川 幸士
Application Number:
JP2011184673A
Publication Date:
June 25, 2014
Filing Date:
August 26, 2011
Export Citation:
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Assignee:
信越化学工業株式会社
International Classes:
G03F7/039; C08F20/38; C08F26/02; C08F28/02; G03F7/004; G03F7/038; G03F7/32; H01L21/027
Domestic Patent References:
JP2008223000A
JP2005097595A
JP2005126692A
JP2005126693A
JP2006011372A
JP2006011373A
JP2006011374A
Attorney, Agent or Firm:
小島 隆司
重松 沙織
小林 克成
石川 武史