Title:
照明光学系、露光装置およびデバイス製造方法
Document Type and Number:
Japanese Patent JP5533917
Kind Code:
B2
Inventors:
Osamu Yatsu
Toshi Nishinaga
Kudo Taketo
Toshi Nishinaga
Kudo Taketo
Application Number:
JP2012075019A
Publication Date:
June 25, 2014
Filing Date:
March 28, 2012
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
H01L21/027; G02B5/04; G02B19/00; G03F7/20
Domestic Patent References:
| JP6053120A | ||||
| JP2000058441A | ||||
| JP2003297727A | ||||
| JP2002231619A | ||||
| JP2003234285A | ||||
| JP7183201A | ||||
| JP2006332355A | ||||
| JP2005167254A | ||||
| JP5090128A | ||||
| JP6118623A | ||||
| JP5226225A | ||||
| JP11204432A | ||||
| JP7318847A |
Attorney, Agent or Firm:
Seiji Ohno
Kobayashi Hideyoshi
Shinji Kato
Mamoru Suzuki
Hiroshi Otani
Kobayashi Hideyoshi
Shinji Kato
Mamoru Suzuki
Hiroshi Otani