Title:
照明光学系、露光装置、およびデバイス製造方法
Document Type and Number:
Japanese Patent JP5534276
Kind Code:
B2
Inventors:
Koji Shigematsu
Application Number:
JP2013173480A
Publication Date:
June 25, 2014
Filing Date:
August 23, 2013
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
H01L21/027; G02B5/30; G02B19/00; G03F7/20
Domestic Patent References:
| JP2007027658A |
Foreign References:
| WO2005076045A1 | ||||
| WO2006016469A1 | ||||
| WO2005124420A1 | ||||
| WO2006077849A1 |
Attorney, Agent or Firm:
Takao Yamaguchi