Title:
リソグラフィ装置および方法
Document Type and Number:
Japanese Patent JP5537455
Kind Code:
B2
Inventors:
Mulder, Heine, Mele
Baselmans, Johannes, Jacobs, Matthews
Enhelen, Adrinus, Franciscus, Petrus
Eulings, Marcus, Franciscus, Antonius
Van Grievenbroek, Hendricks, Robertus, Marie
Tinemans, Patriceus, Aloysius, Jacobs
Van der ven, paul
Enden Dyke, Wilfred, Edward
Baselmans, Johannes, Jacobs, Matthews
Enhelen, Adrinus, Franciscus, Petrus
Eulings, Marcus, Franciscus, Antonius
Van Grievenbroek, Hendricks, Robertus, Marie
Tinemans, Patriceus, Aloysius, Jacobs
Van der ven, paul
Enden Dyke, Wilfred, Edward
Application Number:
JP2011014525A
Publication Date:
July 02, 2014
Filing Date:
January 26, 2011
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
H01L21/027; G02B19/00; G03F7/20
Domestic Patent References:
| JP2003022967A | ||||
| JP2007505488A |
Foreign References:
| US20050237508 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Toshifumi Onuki