ウエーハの平坦化方法 - Incorporated company disco

Title:

ウエーハの平坦化方法

Document Type and Number:

Japanese Patent JP5541681

Kind Code:

B2

Inventors:

Kazuma Sekiya
Hiroshi Onodera
Makoto Shitaya

Application Number:

JP2010009642A

Publication Date:

July 09, 2014

Filing Date:

January 20, 2010

Export Citation:

Assignee:

Incorporated company disco

International Classes:

H01L21/304; B24B7/22

Attorney, Agent or Firm:

Matsumoto 昂
Kenji Ito

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