Title:
シート貼付装置および貼付方法
Document Type and Number:
Japanese Patent JP5542583
Kind Code:
B2
Abstract:
A sheet adhering device (1) attaches an adhesive sheet (MS) that is attached in advance to an opening of a frame (RF) and is sized to protrude beyond an outer periphery of an adherend (W). The sheet adhering device (1) includes a pressing unit (8A, 8B) that presses the adhesive sheet (MS) to attach the adhesive sheet (MS) to the adherend (W) and a slack removal unit (4) that removes a slack of a part of the adhesive sheet protruded beyond the outer periphery of the adherend (W) after the adhesive sheet is attached by the pressing unit (8A, 8B).
Inventors:
Koya 健
Application Number:
JP2010189689A
Publication Date:
July 09, 2014
Filing Date:
August 26, 2010
Export Citation:
Assignee:
LINTEC Corp.
International Classes:
H01L21/683
Attorney, Agent or Firm:
Bottom intellectual property office of patent business corporation Tatsuyuki