Title:
可変容量素子を有する電子機器とその製造方法
Document Type and Number:
Japanese Patent JP5545410
Kind Code:
B2
Abstract:
An electronic device having a variable capacitance element, includes a support substrate providing physical support, a pair of anchors formed on the support substrate, and having support portions in a direction perpendicular to a surface of the substrate, a movable electrode supported by the support portions of the pair of anchors, having opposing first and second side surfaces constituting electrode surfaces, and at least partially capable of elastic deformation, a first fixed electrode supported above the support substrate, and having a first electrode surface opposing to the first side surface of the movable electrode, and a second fixed electrode supported above the support substrate, and having a second electrode surface opposing to the second side surface of the movable electrode.
More Like This:
| WO/2003/009319 | MICRO-ELECTROMECHANICAL SENSOR |
Inventors:
Takeaki Shimauchi
Takama 悟覚
Takashi Katsuki
Toyota 治
Tomoshi Ueda
Takama 悟覚
Takashi Katsuki
Toyota 治
Tomoshi Ueda
Application Number:
JP2013504402A
Publication Date:
July 09, 2014
Filing Date:
March 16, 2011
Export Citation:
Assignee:
FUJITSU, LTD.
International Classes:
H01G5/18; B81B3/00; B81C1/00
Domestic Patent References:
| JP2010199214A | 2010-09-09 | |||
| JP2008182134A | 2008-08-07 | |||
| JP2004074341A | 2004-03-11 | |||
| JP2009233836A | 2009-10-15 | |||
| JP2009252672A | 2009-10-29 |
Attorney, Agent or Firm:
Takahashi Takashi 4 郎