Title:
クライオポンプシステム及びその制御方法
Document Type and Number:
Japanese Patent JP5545858
Kind Code:
B2
Abstract:
A cryopump system includes: a plurality of cryopumps; a plurality of compressor units arranged to operate in parallel in accordance with a control output, respectively, to supply refrigerant gas to the plurality of cryopumps; and a cryopump controller operative to determine the control output for each of the plurality of compressor units. The cryopump controller adjusts a preset value for at least one of the compressor units, the preset value being utilized to determine the control output, so that operation statuses of the respective compressor units are substantially equalized.
Inventors:
Masamichi Ando
Application Number:
JP2010211282A
Publication Date:
July 09, 2014
Filing Date:
September 21, 2010
Export Citation:
Assignee:
Sumitomo Heavy Industries, Ltd.
International Classes:
F04B37/08; F04B49/06
Attorney, Agent or Firm:
Sakaki Morishita
Takehiro Murata
Tomoyoshi Miki
Kimio Tomidokoro
Takehiro Murata
Tomoyoshi Miki
Kimio Tomidokoro