静圧気体軸受 - Canon, Inc.

Title:

静圧気体軸受

Document Type and Number:

Japanese Patent JP5546306

Kind Code:

B2

Inventors:

Yoshihiro Nakasu
Hidenori Shinno
Isato Yoshioka

Application Number:

JP2010068016A

Publication Date:

July 09, 2014

Filing Date:

March 24, 2010

Export Citation:

Assignee:

Canon, Inc.

International Classes:

F16C32/06

Attorney, Agent or Firm:

近島 One husband
Takashi Ota

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