Title:
急な勾配を有するウェハにおける形状および厚さ変動の測定
Document Type and Number:
Japanese Patent JP5546533
Kind Code:
B2
Abstract:
A system with two unequal path interferometers, with a first flat, a second flat, and a cavity between the first and second flats, a holder to receive an object in the cavity such that an optical path remains open between the first and second flats, and a motor coupled to the holder such that the object may be tilted in the cavity to allow for measurements of, and a radiation assembly to direct collimated radiation to the interferometer assembly, a collecting assembly to collect radiation received from the interferometer assembly, and a controller comprising logic to; vary a wavelength of the radiation, record interferograms, extract phases of the interferograms to produce phase maps, determine from each map areas with high slopes, tilt the holder to allow measurement of the high slope areas, and process measurement that covers the entire surface of the object.
Inventors:
Tongue show phone
サッペイ romance
サッペイ romance
Application Number:
JP2011509711A
Publication Date:
July 09, 2014
Filing Date:
May 14, 2009
Export Citation:
Assignee:
KLA * Tenca corporation KLA*TENCOR CORPORATION
International Classes:
G01B11/24; G01B9/02; G01B11/06
Attorney, Agent or Firm:
Patent business corporation Akinari international patent firm