Title:
搬送装置
Document Type and Number:
Japanese Patent JP5550197
Kind Code:
B2
Inventors:
劉 哲
Warrior Kazuhiro
South Nobufumi
Warrior Kazuhiro
South Nobufumi
Application Number:
JP2012528594A
Publication Date:
July 16, 2014
Filing Date:
August 08, 2011
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
B25J9/06; B23Q7/00; H01L21/677
Domestic Patent References:
JP2002066966A | 2002-03-05 | |||
JPH11347974A | 1999-12-21 | |||
JP2003170380A | 2003-06-17 | |||
JP2004130459A | 2004-04-30 | |||
JP2008284689A | 2008-11-27 | |||
JP2000150617A | 2000-05-30 | |||
JP2002066966A | 2002-03-05 | |||
JPH11347974A | 1999-12-21 | |||
JP2003170380A | 2003-06-17 | |||
JP2004130459A | 2004-04-30 |
Attorney, Agent or Firm:
Omori Junichi
折居 Chapter
折居 Chapter