Title:
欠陥分類装置及び分類調整方法
Document Type and Number:
Japanese Patent JP5550862
Kind Code:
B2
Inventors:
Ono Truth
嶺川 Yohei
Junko Konishi
Hirai 大博
Hironari Isomae
嶺川 Yohei
Junko Konishi
Hirai 大博
Hironari Isomae
Application Number:
JP2009172104A
Publication Date:
July 16, 2014
Filing Date:
July 23, 2009
Export Citation:
Assignee:
Hitachi High-Technologies Corp.
International Classes:
G01N23/225; G06T1/00; G06T7/00; H01L21/66
Attorney, Agent or Firm:
Patent business corporation SHOYO Intellectual Property Firm