Title:
エンコーダ及びエンコーダの位置検出方法
Document Type and Number:
Japanese Patent JP5560873
Kind Code:
B2
Inventors:
Kiichiro Yamabe
Application Number:
JP2010098184A
Publication Date:
July 30, 2014
Filing Date:
April 21, 2010
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G01D5/249; G01D5/244; G01D5/347; G01D5/36
Domestic Patent References:
| JP2006226987A | ||||
| JP200254923A | ||||
| JP518782A | ||||
| JP2278120A |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Kazuya Nishi
Tadashi Takahashi
Kazuya Nishi