Title:
石英ガラスルツボ製造装置の電極構造
Document Type and Number:
Japanese Patent JP5562518
Kind Code:
B2
Inventors:
Hiroshi Kishi
Minoru Kanda
Ken Isobe
Takamichi Tomaki
Minoru Kanda
Ken Isobe
Takamichi Tomaki
Application Number:
JP2007339344A
Publication Date:
July 30, 2014
Filing Date:
December 28, 2007
Export Citation:
Assignee:
Sumco inc.
Nittetsu Sumikin Finetech Co., Ltd.
Nittetsu Sumikin Finetech Co., Ltd.
International Classes:
C03B20/00; C03B19/09; C30B15/10; C30B29/06
Domestic Patent References:
| JP2004502630A | ||||
| JP2003243151A | ||||
| JP11236233A | ||||
| JP2000264776A | ||||
| JP2007045704A | ||||
| JP2000327478A |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Yasuhiko Murayama
Tadashi Takahashi
Yasuhiko Murayama