Title:
新規な化合物およびその製造方法、酸発生剤、レジスト組成物およびレジストパターン形成方法
Document Type and Number:
Japanese Patent JP5564555
Kind Code:
B2
Inventors:
Hideo Haneda
Takeshi Iwai
Takehiro Seshita
Akira Kawakami
Keita Ishizuka
Takeshi Iwai
Takehiro Seshita
Akira Kawakami
Keita Ishizuka
Application Number:
JP2012280302A
Publication Date:
July 30, 2014
Filing Date:
December 21, 2012
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
C07D335/02; C07C25/02; C07C303/32; C07C309/10; C07D333/46; C09K3/00; G03F7/004; G03F7/039; C07B61/00
Domestic Patent References:
| JP5238216B2 | ||||
| JP5193513B2 | ||||
| JP2005148291A |
Attorney, Agent or Firm:
Sumio Tanai
Masatake Shiga
Suzuki Mitsuyoshi
Mitsunaga Igarashi
Masatake Shiga
Suzuki Mitsuyoshi
Mitsunaga Igarashi