Title:
接続方法及び接続装置
Document Type and Number:
Japanese Patent JP5567893
Kind Code:
B2
Inventors:
Katsuya Kudo
Application Number:
JP2010103176A
Publication Date:
August 06, 2014
Filing Date:
April 28, 2010
Export Citation:
Assignee:
Dexerials Co., Ltd.
International Classes:
H01L21/60
Domestic Patent References:
| JP2009260379A | ||||
| JP2007182062A | ||||
| JP2009161755A | ||||
| JP2001210675A | ||||
| JP2006049739A | ||||
| JP2009123792A | ||||
| JP7135235A |
Attorney, Agent or Firm:
Akira Koike
Seiji Iga
Toshiya Fujii
Nobuhiro Noguchi
Yusei Atsuya
Seiji Iga
Toshiya Fujii
Nobuhiro Noguchi
Yusei Atsuya