Title:
半導体装置の製造方法
Document Type and Number:
Japanese Patent JP5569556
Kind Code:
B2
Inventors:
Yuji Setsuda
Two valleys Extensive 貴
Two valleys Extensive 貴
Application Number:
JP2012114233A
Publication Date:
August 13, 2014
Filing Date:
May 18, 2012
Export Citation:
Assignee:
FUJITSU semiconductor incorporated company
International Classes:
H01L21/027; G02B19/00; G03F7/20
Attorney, Agent or Firm:
Kitano Yoshito