Title:
真空乾燥装置及び真空乾燥方法
Document Type and Number:
Japanese Patent JP5574318
Kind Code:
B2
Inventors:
Katsuhiko Ito
Yoichi Ohinata
Takao Kinoshita
Yoichi Ohinata
Takao Kinoshita
Application Number:
JP2009121081A
Publication Date:
August 20, 2014
Filing Date:
May 19, 2009
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
F26B5/06
Attorney, Agent or Firm:
Omori Junichi
折居 Chapter
折居 Chapter