Title:
3次元フォトニック結晶の作製方法および機能素子
Document Type and Number:
Japanese Patent JP5578829
Kind Code:
B2
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Inventors:
Kazuya Nohayashi
Application Number:
JP2009237659A
Publication Date:
August 27, 2014
Filing Date:
October 14, 2009
Export Citation:
Assignee:
Canon, Inc.
International Classes:
G02B1/02; G02B3/00; G02B6/12
Attorney, Agent or Firm:
Ryosuke Fujimoto
Atsuya Mizumoto
Atsuya Mizumoto