Title:
駆動周波数同調可能ＭＥＭＳジャイロスープ
Document Type and Number:
Japanese Patent JP5580341
Kind Code:
B2
Abstract:
A drive frequency tunable MEMS sensor in one embodiment includes a mass, a mass drive component configured to drive the mass within a plane, a plurality of non-linear springs supporting the mass a first tuner operably connected to the plurality of non-linear springs for modifying the stress condition of the plurality of non-linear springs in response to a trim voltage, and a trim circuit electrically coupled with the first tuner for providing the trim voltage.
Inventors:
ロツェニク, Marco
Application Number:
JP2011551122A
Publication Date:
August 27, 2014
Filing Date:
February 10, 2010
Export Citation:
Assignee:
Roberto Bosch gesellschaft Mytho ベシュレンクテル ハフツング ROBERT BOSCH GMBH
International Classes:
G01C19/5733
Attorney, Agent or Firm:
Ono Shinjiro
Kobayashi 泰
Akio Chiba
Hiroyuki Tomita
Kobayashi 泰
Akio Chiba
Hiroyuki Tomita