Title:
荷電粒子ビーム描画方法および装置
Document Type and Number:
Japanese Patent JP5586183
Kind Code:
B2
Abstract:
A charged particle beam drawing apparatus for drawing patterns corresponding to figures in a drawing data, has a portion for dividing a drawing area on the workpiece into block frames, a portion for combining at least a first block frame and a second block frame into a virtual block frame, and a portion for transferring a data of the virtual block frame from an input data dividing module to a common memory of a first converter and a second converter. The first converter converts a data of a first figure included in the first block frame into a first drawing apparatus internal format data. The second converter converts a data of a second figure included in the second block frame into a second drawing apparatus internal format data. The first figure and the second figure are included in a cell extending over the first block frame and the second block frame.
Inventors:
Shibata Hayato
twilight Etc.
Security Akihito
Jun Yashima
Field Shigehiro
Big tree 進
twilight Etc.
Security Akihito
Jun Yashima
Field Shigehiro
Big tree 進
Application Number:
JP2009167179A
Publication Date:
September 10, 2014
Filing Date:
July 15, 2009
Export Citation:
Assignee:
NuFlare Technology, Inc.
International Classes:
H01L21/027; H01J37/305
Attorney, Agent or Firm:
Mitsuyuki Matsuyama
Tetsuma Ikegami
Tetsuma Ikegami